Forschungsbericht 2005

4-07 Mikrosystemtechnik

Mikrosysteme und Dünnschichttechniken für Halbleiter, Sensoren und Optik

Forschungsprojekte

• E.4-07.001 SONDE - Aktive intravaskuläre Magnetresonanz-Sonde in Mikrosystemtechnik zur örtlich hochaufgelösten Charakterisierung der Gewebeeigenschaften auf Basis einer optischen Signalübertragung
• E.4-07.002 Breitbandig abstimmbarer integriert-optischer Klinkenrad-Laser in dotierten Aluminiumoxid-Wellenleitern
• E.4-07.003 Trennsäulenentwicklung für einen miniaturisierten Gas Chromatograph
• E.4-07.007 Gas-Sensorsystem auf Basis ionenleitender plasmapolymerisierter Schichten auf nanoporösen Siliziummembranen
• E.4-07.011 Entwicklung einer Methanol-Brennstoffzelle in Mikrosystemtechnik
• E.4-07.012 Elektronenstrahl-kristallisierte Silizium-a-Si-poly-Si-Dickschicht-Solarzellen auf Floatglas-Substrat
• E.4-07.013 Human Body Sensing (HBS)
• E.4-07.014 Entwicklung einer Schaltungstechnologie für den Submillimeterwellenbereich
• E.4-07.017 Infrarot-Meßsystem auf Basis von Silizium-Wellenleiter für die Umweltanalytik
• E.4-07.018 Herstellung und Optimierung eines elektromagnetisch betriebens Mikrokugelventils
• E.4-07.029 Enwicklung von Fixateur-interne-Systemen als intelligente Implantate
• E.4-07.030 Telemetrisches Diagnose-Netz für mobiles Patienten-Monitoring
• E.4-07.031 Miniaturisierter Analysat-Sammler
• E.4-07.032 Si-Technologie auf Transfersubstraten für extrem leistungsarme Applikationen im GHz-Bereich
• E.4-07.034 FEM - Simulation gekoppelter Probleme der Mikrosystemtechnik
• E.4-07.035 Treibmittelhochvakuumpumpe mit integrierter Druckmessung in Mikrosystemtechnik
• E.4-07.036 Aufbau von integriert optischen Verstärker-, Entzerrer- und Verteilersystemen
• E.4-07.037 Effiziente FEM Simulation für die Mikrophotonik
• E.4-07.043 Automatischer externer Fixateur für die optimierte klinische, autarke ambulante oder telemedizinisch gesteuerte Fraktur- und Fehlstellungsbehandlung auf der Basis einer parallelen Roboterkinematik
• E.4-07.044 Verkapselte CMOS-kompatible mikromechanische Hochfrequenz-Resonatoren in SOI
• E.4-07.081 Hardware- und Software-Entwicklung
• E.4-07.488 Integriertes Massenspektrometer in Mikrosystemtechnik
• E.4.07.008 Herstellung und Charakterisierung von DMFC-Membranen und MEAs

Kooperationen

• ABB
• Berufsgenossenschaftliches Unfallkrankenhaus Hamburg (BUK)
• GerroMed Pflege- und Medizintechnik
• INMEDITEC Medizintechnik GmbH
• MRI Devices Daum
• Nortel
• Philips
• Philips Medical Systems
• Philips Semiconductors
• SLS
• Vaisala
• Volkswagen Stiftung
• litos

Publikationen

Veröffentlichungen

• 4-07.001V
  Th. Uelzen, J. Müller Wettability enhancement by rough surfaces generated by thin film technology, Thin Solid Films 434 (2003) 311-315
• 4-07.002V
  D. Gruber, F. Kraus, J. Müller, A novel gas sensor design based on CH4/H2/H2O plasma etched ZnO thin films, Sensors and Actuators B, 92, 81-89, 2003
• 4-07.003V
  L. Mex, J. Müller, Plasma polymerised electrolyte membrane for miniaturised direct methanol fuel cells, Membrane Technology, 115, 5-9, 1999
• 4-07.005V
  C. Francke, B. Meyer, J. Müller, SNS-dc-SQUIDs and thin film flux transformers for YBCO-magnetometers in flip-chip technipue, Applied Superconductivity 95, ed. D. Hughes (Bristol: IOP), 1601-1604, Bristol, 1999, UK
• 4-07.006V
  C. Francke, L. Mex, B. Meyer, A. Krämer, J. Müller, Großflächige Flußtransformatoren in HTS flip-chip Magnetometern, Supraleitung und Tieftemperaturtechnik 96, 217-220, Düsseldorf, 1996, Deutschland
• 4-07.007V
  C. Francke, L. Mex, A. Krämer, B. Meyer, J. Müller, Large area flux transformers and passivation for flipchip magnetometers, IEEE Trans Appl. Supercond., 7, 2768-2771, New York, 1997, USA
• 4-07.008V
  C. Francke, A. Krämer, L. Mex, J. Müller, YBCO flip-chip SQUID magnetometers with large pick up loops, Applied Superconductivity 97, ed. H. Rogalla and D.A.H. Blank (Bristol: IOP), 643-646, Bristol, 1997, UK
• 4-07.009V
  L. Mex, A. Krämer, C. Francke, J. Müller, Plasmapolymerized hexamethyldisilazane for the passivation of YBCO-devices, Supercond. Sci. Technol., 11, 426-432, 1998
• 4-07.010V
  C. Francke, M. Offner, A. Krämer, L. Mex, J. Müller, Fabrication of YBCO step edge Josephson junctions for low-noise dc-SQUIDs, Supercond. Sci. Technol., 11, 1311-1316, 1998
• 4-07.011V
  C. Francke, A. Krämer, M. Offner, R. Strade, L. Mex, J. Müller, Ion beam etching of substrate steps: SNS compared to step-edge grain boundary Josephson junctions, Appl. Supercond. 1999
• 4-07.012V
  A. Krämer, L. Mex, C. Francke, J. Müller, S. Kittelberger, Passivation of YBCO dc-SQUIDs using polymerized hexamethyldisilazane, IEEE Trans. Appl. Supercond., 9, New York, Juni, 1999, USA
• 4-07.013V
  L. Mex, K. Heinicke, A. Krämer, C. Francke, J. Müller, Passivation of YBCO-devices using polymerised hexamethyldisilazane, Applied Superconduxtivity, 97, ed. H. Rogalla and D.A.H. Blank (Bristol: IOP), 161, 1997, UK
• 4-07.014V
  A. Krämer, C. Francke, L. Mex, J. Müller, High Tc dc-SQUIDs coupled to flux transformers in flip-chip technique, Ext. Abstr. of ISEC '97, ed. H. Koch and S. Knappe (Braunschweig: PTB), 19-20, 1997, Germany
• 4-07.015V
  A. Krämer, U. Schlemm, B. Meyer, C. Francke, J. Müller, SNS-Josephson Kontakte in dc-SQUIDs und Magnetometern, Verhandl. DPG (VI), 31, 2030, 1996
• 4-07.016V
  U. Schlemm, C. Francke, A. Krämer, L. Mex, J. Müller, SNS-Josephson-Kontakte in dc-SQUIDs und Magnetometern, Verhandl. DPG (VI), 31, 2028, 1996
• 4-07.017V
  L. Mex, C. Francke, B. Meyer, J. Müller , YBCO/STO/YBCO-Mehrlagentechnologie und Flußtransformatoren mit großen Aufnehmerflächen, Verhandl. DPG (VI), 31, 2030, 1996
• 4-07.018V
  K. Heinicke, L. Mex, A. Krämer, C. Francke, J. Müller, Passivierung von YBCO-Bauelementen mittels plasmapolymerisierter Si-C-H-O-N Schichten, Verhandl. DPG (VI), 32, 975, 1997
• 4-07.019V
  C. Francke, L. Mex, A. Krämer, J. Müller, Flußtransformatoren aus YBCO in dc-SQUID Magnetometern, Verhandl. DPG (VI), 32, 1016, 1997
• 4-07.020V
  L. Mex, A. Krämer, C. Francke, J. Müller, Plasmpolymerisiertes Hexamethyldisilazan zur Passivierung kryoelektronischer Bauelemente aus YBCO, Verhandl. DPG (VI), 33, 956, 1998
• 4-07.021V
  A. Krämer, C. Francke, L.Mex, R. Strade, J. Müller, Flip-Chip Magnetometer aus YBCO, Verhandl. DPG (VI), 33, 963, 1998
• 4-07.022V
  C. Francke, M. Offner, A. Krämer, J. Müller, Herstellung rauscharmer dc-SQUIDs mit step-edge Josephsonkontakten aus YBCO, Verhandl. DPG (VI), 33, 959, 1998
• 4-07.023V
  R. Höper, A. Krämer, C. Francke, J. Müller, Rauschmessungen...., Verhandl. DPG (VI), 34, 959, 1999
• 4-07.024V
  J. P. Schmid, A. Cordes, J. Müller, Laser-fibre-coupling by means of a silicon micro-optical bench and a selfaligned soldering process , Proc. Advances Networks and Services, Amsterdam, 1995
• 4-07.025V
  A. Feustel, V. Relling, J. Schröder, J. Müller, Micro mass spectrometer, Kongressband Sensor 95, Proceedings, pp. 465, Nürnberg, 1995, Germany
• 4-07.026V
  P. Siebert, G. Petzold, J. Müller, Processing of complex microsystems: a micro mass spectrometer, Symposium on Design, Test, and Microfabrication of MEMS and MOEMS, p. 562-571, Paris, 1999, France
• 4-07.029V
  P. Siebert, G. Petzold, J. Müller, Surface microstructure / miniature mass spectrometer, Applied Physics A, 1998, Germany
• 4-07.030V
  O. A. Mohammed, F. G. Üler, S. Russenschuck, M. Kasper, Design optimization of a superferric octupole using various evolutionary and deterministic techniques, IEEE Transaction on Magnetics, 1816-1821, 1997
• 4-07.031V
  Jürgen Franz, Manfred Kasper, Superconvergent finite element solutions of Laplace and Poisson equation, IEEE Transactions on Magnetics, Vol. 32, 5, 643-646, 1996
• 4-07.032V
  Manfred Kasper, Kay Hameyer, Arnulf Kost, Automated optimal design of a permanent magnet DC motor using global evolution strategy and FEM, International Journal of Applied Electro-magnetics and Mechanics, 6, 367-376, 1995
• 4-07.033V
  Manfred Kasper, Jürgen Franz, Highly accurate computation of field quantities and forces by superconvergence in finite elements, IEEE Transactions on Magnetics, Vol. 31, 5, 1424-1427, 1995
• 4-07.034V
  Ralph Schacht, Manfred Kasper, Herbert Reichl, Macro modelling for transient simulation of coupled electro-thermal problems for an IGBT module, THERMINIC 99, 5th International Workshop on Thermal Investigations of ICs and Microstructures, Rome, 4-6 October, 1999
• 4-07.035V
  Mark Bludszuweit, Manfred Kasper, Simulation optischer Wellenleiter unter thermischer und mechanischer Belastung, Multi-Nature Systems, Optoelektronische, Mechatronische und sonstige gemischte Systeme, S. 113-121, GMM-ITG-GI-Workshop, Jena, 11. Februar, 1999
• 4-07.036V
  Ralph Schacht, Manfred Kasper, Entwurf eines Makromodells zur transienten Simulation von gekoppelten thermisch-elektrischen Problemen am Beispiel eines IGBT, Multi-Nature Systems Optoelektronische, Mechatronische und sonstige gemischte Systeme, S. 93-101, GMM-ITG-GI-Workshop, Jena, 11. Februar, 1999
• 4-07.037V
  Mark Bludszuweit, Manfred Kasper, Analysis of integrated optical devices under thermal and mechanical loads, Micro System Technologies 98, ISBN 3-8007-2421-9, p. 509-514, Potsdam, 1-3 December, 1998
• 4-07.038V
  Manfred Kasper, Komponentensimulation, Komponentenmodelle und ihre Verwendung in der Systemsimulation, VDI / GI Diskussionssitzung Heterogene Systeme, Vortrag, Ilmenau, 17. März, 1997
• 4-07.039V
  Manfred Kasper, Carsten Recke, Thomas Vogel, Modellierung von Mikrosystemen und ihrer Komponenten, Workshop Modellbildung für die Mikro-systemtechnik (MIMOSYS), S. 3-8, Paderborn, 5. Dezember, 1996
• 4-07.040V
  Carsten Recke, Thomas Vogel, Manfred Kasper, Entwurfsumgebung zur Modellierung und Simulation mit Makromodellen, Methoden und Werkzeugentwicklung für den Mikrosystementwurf, ISSN 0947-1413, S. 93-117, FZ Karlsruhe, 18. und 19. November, 1996
• 4-07.041V
  C. Recke, T. Vogel, M. Kasper, G. Mück, S. Reitz, R. Röder, Modellierung von Mikrosystemen und ihrer Komponenten, Methoden und Werkzeugentwicklung für den Mikrosystementwurf, ISSN 0947-1413, S. 203-215, FZ Karlsruhe, 18. und 19. November, 1996
• 4-07.042V
  A. Owzar, M. Kasper, J. Wolf, K. Buschick, M. Töpper, O. Ehrmann, H. Reichl, Electical characterization of thin-film wiring using meshed ground, VLSI Packaging Workshop, Kyoto, Japan, Dec. 1996
• 4-07.043V
  O. A. Mohammed, F. G. Üler, S. Russenschuck, M. Kasper, Design optimization of a superferric octupole using various evotutionary and deterministic techniques, invited paper, CEFC'94, Seventh Binnial IEEE Conference on the Electromagnetic Field Computation, Okajama, 18-20 March, 1996
• 4-07.044V
  Carsten Recke, Thomas Vogel, Manfred Kasper, Modellgenerierung für mechanische Mikrosystem-Komponenten, Methoden und Werkzeuge zum Entwurf von Mikrosystemen, ISSN 0947-1413, S.100-109, Karlsruhe, 14. November, 1995
• 4-07.045V
  Amir Owzar, Klaus Buschik, Oswin Ehrmann, Manfred Kasper, RF-investigation of the electrical parameters of the embedded chip structure, VLSI Packaging Workshop, Monterey, USA, October 16-18, 1995
• 4-07.047V
  Jürgen Franz, Manfred Kasper, Superconvergent finite element post-processing of Laplace and Poisson equation, COMPUMAG, 10th Conference on the Computation of Electromagnetic Fields, Berlin, July 10-13, 1995
• 4-07.048V
  Gerhard Fotheringham, Manfred Kasper, Jörg Klockau, Layered transmission lines consisting of normal and superconducting materials, Proceedings 10th European Microelectronics Conference, S. 116-122, Copenhagen, Denmark, May 14-17, 1995
• 4-07.049V
  A. Feustel, J. Müller, V. Relling, A microsystem mass-spectrometer, 1st Micro Total Anal. Syst., Proc. µTas '94 Workshop, pp. 299, 1994
• 4-07.050V
  L. Mex, J. Müller, Miniaturised direct methanol fuel cell with a plasma polymerised electrolyte membrane, in Microreaction Technology: Industrial Prospects, Ed. W. Ehrfeld, Springer-Verlag, Berlin, 402-408, 2000
• 4-07.051V
  L. Mex , J. Müller, Thin film membrane electrode assembly for direct methanol fuel cells, in Advances in R&D for the commercialization of small fuel cells and battery technologies for use in portable applications, Ed. The Knowledge Foundation, Brookline, 5-21, 2001
• 4-07.052V
  L. Mex, N. Ponath, J. Müller, Miniaturized fuel cells based on microsystem technologies, Fuel Cells Bulletin, 39, 9-12, 2001
• 4-07.053V
  L. Mex, M. Sussiek, J. Müller, Plasma polymerized electrolyte membranes and electrodes for miniaturized fuel cells, Chemical Engineering Communications, 190, 1085-1095, 2003
• 4-07.054V
  D. Schulz, C. Glingener, M. Bludszuweit, E. Voges, Mixed finite element beam propagation method, Journal of Lightwave Technology, Vol. 16, 7, 1336-1342, 1998
• 4-07.055V
  S. Zimmermann, B. Riepenhusen, J. Müller, Micromachined flame analyzers, Proceedings µTAS '98, 473-476, Banff, Canada, October 1998
• 4-07.056V
  S. Zimmermann, B. Riepenhusen, J. Müller, Micromachined flame analyzers: flame ionization detector (FID) and atomic emission flame spectrometer (AES), Proceedings SENSOR '99, Vol. 1, 409-413, Nürnberg, Mai 1999
• 4-07.057V
  S. Zimmermann, B. Riepenhusen, J. Müller, Micromachined atomic emission flame spectrometer and flame ionization detector, Proceedings EUSPEN '99, Vol. 1, 502-505, Bremen, Mai 1999
• 4-07.058V
  S. Zimmermann, S. Wischhusen, J. Müller, Micromachined flame ionization detector and flame spectrometer, Proceedings SPIE '99, Vol. 3876, 238-245, Santa Clara, USA, May 1999
• 4-07.059V
  S. Zimmermann, S. Wischhusen, J. Müller, A µTAS - atomic emission flame spectrometer (AES), Proceedings µTAS 2000, 135-138, Enschede, Niederlande, Mai 2000
• 4-07.060V
  S. Zimmermann, S. Wischhusen, J. Müller, Micro flame ionization detector and micro flame spectrometer, Sensors & Actuators B, No. 63, 5, 159-166, 2000
• 4-07.061V
  K. Duwe, S. Hirsch, R. Judaschke, J. Müller, Micromachined coplanar waveguides on thin dielectric HMDSN-membranes, 25th International Conference on Infrared and Millimeter Waves (IRMMW2000), Peking, China, September 2000
• 4-07.062V
  S. Hirsch, K. Duwe, R. Judaschke, A transition from rectangular waveguide to coplanar waveguide on membrane, 25th International Conference on Infrared and Millimeter Waves (IRMMW2000), Peking, China, September 2000
• 4-07.063V
  O. Blume, M. Mahnke, D.Sander, J. Müller, Rare earth doped Al2O3-thin film waveguides deposited by MO-PECVD and MO-LPCVD on silicon substrates, Conference on Lasers and Electro-Optics Europe, p. 77, 1996
• 4-07.064V
  M. Mahnke, O. Blume, J. Reininger, J. Müller, In situ doped Al2O3 MO-PECVD and MO-LPCVD thin film waveguides on silicon substrates, 8th European Conference on Integrated Optics, 404-407, 1997
• 4-07.065V
  H. J. Heider, U.-P. Dahms, M. Mahnke, M. Bludszuweit, J. Müller, Optical transceiver in integrated and micro-optics on silicon, Proc. Spie, Vol. 3950, Jan. 2000, San Jose
• 4-07.066V
  U.-P. Dahms, V. Müllerwiebus, H. J. Heider, M. Mahnke, M. Bludszuweit, J. Müller, Self-aligned laser-fiber coupling using tin/gold (20/80) solder on micro-optical silicon bench, Proc. Spie, Vol. 3952, Jan. 2000, San Jose
• 4-07.067V
  M. Mahnke, S. Wiechmann, H. J.Heider, O. Blume, J. Müller, Aluminum oxide doped with erbium, titanium and chromium for active integrated optical applications, Archiv für Elektronik und Übertragungstechnik, Vol. 55, No. 5, p. 342-348, 2001
• 4-07.068V
  H. J. Heider, S. Wiechmann, M. Mahnke, J. Müller, Optical transceiver on silicon with self-aligned laser-diode, Proc. Spie, Vol. 4652, Jan. 2002, San Jose
• 4-07.069V
  S. Wiechmann, H. J. Heider, M. Mahnke, J. Müller, Wavelength division multiplexing with a self-focussing transmission grating, Proc. Spie, Vol. 4653, Jan. 2002, San Jose
• 4-07.070V
  Mark Bludszuweit, Manfred Kasper, Error indicator and adaptive meshing for hierarchical FEM-simulation of waveguides, In: Ursula van Rienen, Michael Günther, Dirk Hecht (eds.): Scientific Computing in Electrical Engineering, Springer, Berlin, p. 285-292, 2001
• 4-07.071V
  Manfred Kasper, Mikrosystementwurf, Entwurf und Simulation von Mikrosystemen, Springer, Berlin, ISBN 3-540-66497-1, 2000
• 4-07.072V
  S. Hirsch, K. Duwe, R. Judaschke, A coplanar fed micromachined planar antennas for power combining applications at D-band frequencies, 8th International Conference on Terahertz Electronics, Darmstadt, September 2000, Deutschland
• 4-07.073V
  K. Duwe, S. Hirsch, R. Judaschke, J. Müller, A micromachined planar antennas for D-band frequencies, 8th International Conference on Terahertz Electronics, Darmstadt, September 2000, Deutschland
• 4-07.074V
  S. Hirsch, Qi Chen, K. Duwe, R. Judaschke, A design and characterization of coplanar waveguides and filters on thin dielectric membranes at D-band frequencies, 4th International Kharkov Symposium "Physics and Engineering of Millimeter and Submillimeter Waves", Kharkov, Juni 2001, Ukraine
• 4-07.075V
  K. Duwe, S. Hirsch, J. Müller, A micromachined low pass filters and coplanar waveguides for D-band frequencies based on thin HMDSN-membranes, 4th International Kharkov Symposium "Physics and Engineering of Millimeter and Submillimeter Waves", Kharkov, Juni 2001, Ukraine
• 4-07.076V
  G. Petzold, P. Siebert, J. Müller, A micromachined electron beam ion source, Proc. µTAS 2000, p. 171-174, Enschede, 2000
• 4-07.077V
  G. Petzold, P. Siebert, J. Müller, A micromachined electron beam ion source, Sensors and Actuators B, No. 67, p.101-111, 2000
• 4-07.078V
  G. Petzold, J. Müller, A micromachined mass spectrometer, Proceedings Sensor 2001, Vol. 2, p. 95-100, Nürnberg, 2001
• 4-07.079V
  G. Petzold, P. Siebert, J. Müller, A micromachined mass spectrometer, Proceedings µTAS 2001, pp.230, Monterey, CA, USA, 2001
• 4-07.080V
  O. Krusemark, K. Pfeiffer, J. Müller, An optimized electromagnetically activated micro ballvalve, Proc. Sensor '99, Vol. 2, p. 405-408, 1999
• 4-07.081V
  O. Krusemark, A. Feustel, J. Müller, Micro ball valve for fluidic micropumps and gases, Proc. µTAS '98, p. 399-402, 1999
• 4-07.082V
  O. Krusemark, A. Feustel, J. Müller, Electromagnetic active micro valve for fluids and gases, Proc. Actuator '98, p. 126-128, 1998
• 4-07.083V
  A. Feustel, O. Krusemark, J. Müller, Piezoelectric membrane pump with integrated ball valves, Proc. Actuator '98, p. 39-42, 1998
• 4-07.084V
  N. Weinrich, K. Seide, C. Jürgens, D. Wolter, M. Azeem, K. Dembowski, D. Rieck, J. Müller, Mikrocontroller basiertes Telemetriesystem zur Messung der Belastung von Fixateur interne Systemen in vivo, Beiträge der Informationstagung Mikroelektronik 2001 (ME '01), ÖVE Schriftenreihe Nr. 26, S. 435-441, 2001
• 4-07.085V
  G. Schoer, H.J. Heider, S. Wiechmann, J. Müller, TiO2-Waveguide with ZnO-ZnO:Al cladding for active optical subsystems, to be published in SPIE proceedings, Photonics West, San Jose, 2003
• 4-07.086V
  D. Gruber, N. Ponath, J. Müller, Proton-conducting membranes prepared by plasma polymerization for reducing methanol permeation in DMFCs, First International Conference on Fuel Cell Development and Deployment, March 7-10, 2004, Storrs, USA
• 4-07.087V
  D. Gruber, N. Ponath, J. Müller, Reduced methanol permeation in DMFCs through a plasma-polymerized proton-conducting membrane, Proceedings of Euromembrane 2004, Ed. J. Hapke, Ch. Na Ranong, D. Paul, K.-V. Peinemann, Sep 28 - Oct 1, 2004, Hamburg, Germany
• 4-07.088V
  D. Gruber, N. Ponath, J. Müller, Plasma-polymerized proton-conducting membranes for reducing methanol permeation in DMFCs, Journal of Fuel Cell Science and Technology, 2, 186-189, 2005
• 4-07.089V
  D. Gruber, N. Ponath, J. Müller, F. Lindstaedt, Sputter-deposited ultra-low catalyst loadings for PEM fuel cells, Journal of Power Sources, 150, 67-72, 2005
• 4-07.090V
  D. Gruber, N. Ponath, J. Müller, Microfabricated polymer electrolyte membrane fuel cells with low catalyst loadings, Electrochimica Acta, 2005, in press
• 4-07.091V
  D. Gruber, N. Ponath, J. Müller, Low catalyst loadings for PEM fuel cells prepared by sputter deposition, Proceedings 207th meeting of the Electrochemical Society, May 15-20, 2005, Québec City, Canada
• 4-07.092V
  D. Gruber, N. Ponath, J. Müller, A microfabricated PEMFC with low catalyst loading prepared by sputter deposition, 2nd International Conference on Polymer Batteries and Fuel Cells (PBFC-2), June 12-17, 2005, Las Vegas, USA
• 4-07.093V
  N. Ponath, D. Gruber, J. Müller, Proton conducting plasma-polymerized membranes, 2nd International Conference on Polymer Batteries and Fuel Cells (PBFC-2), June 12-17, 2005, Las Vegas, USA
• 4-07.094V
  D. Gruber, N. Ponath, J. Müller, Hydrogen PEMFCs prepared by microfabrication, International Conference and Trade Fair on Hydrogen and Fuel Cell Technologies, August 31 - September 1, 2005, Hamburg, Germany
• 4-07.100V
  M. Rostalsky, J. Müller, High rate deposition and electron beam recrystallization of silicon films for solar cells, thin solid films 401, 2001, 84-87
• 4-07.101V
  M. Rostalsky, N. Linke, J. Heemeier, J. Müller, High Rate Plasma-Enhanced Chemical Vapor Deposition and Electron Beam Crystallization of Doped Silicon Layers for High Efficiency Solar Cells, EURESCO Conference on Photovoltaic Devices, Tomar, Portugal, 2001
• 4-07.102V
  J. Heemeier, M. Rostalsky, F. Gromball, N. Linke, J. Müller, Thin Film Technology for Electron Beam Crystallized Silicon Solar Cells on Low Cost Substrates, 29th IEEE Photovoltaic Specialists Conference, New Orleans, LA, USA, 2002
• 4-07.103V
  T. Injinaash, J. Müller, K.Dembowski Thermopneumatical operated Print-Head System for a Short Base Chain Nucleotide-Chips in Microsystem Technology, Proceedings of International Congress on Biocatalysis 2002, p.242-243, Hamburg, Germany
• 4-07.104V
  S. Wiechmann, H.J. Heider, M. Mahnke, J. Müller, An Integrated Optical Transmission Grating in Al2O3 and TiO2 Planar Waveguide Technology, Proceedings of Opto 2002, Erfurt, Germany
• 4-07.105V
  S. Wiechmann, H.J. Heider, J. Müller, High Refractive Index Contrast Transmission Grating for Integrated Optical Wavelength Division Multiplexing, Proceedings of ECOC 2002, P1.31, Copenhagen, Danmark
• 4-07.106V
  F. Kraus, S. Cruz, J. Müller, Plasmapolymerized silicon organic thin films from HMDSN for capacitive humidity sensors, Sensors and Actuators B, 88, 300-311, 2003
• 4-07.107V
  F. Kraus, S. Cruz, J. Müller, Capacitive Humidity Sensor with Plasmapolymerized HMDSN as Moisture Sensitive Dielectricum, Proceedings of Sensor 1999, Nürnberg, Germany
• 4-07.108V
  K. Seide, N. Weinrich, C. Jürgens, J. Müller, Intelligent External and Internal Fixator Systems for Fracture Treatment, 2nd European Medical and Biological Engineering Conference EMBEC 2002, IFMBE Proceedings Vol. 3(2), S. 980-981, 2002
• 4-07.109V
  K. Seide, D. Wolter, C. Jürgens, N. Weinrich, Is X-Ray Free Monitoring of Fracture Healing Possible by Multi-Dimensional Load Measurements in an External Fixator?, Transactions of the 48th Annual Meeting of the Orthopaedic Research Society, Dallas, Poster No. 0717, 2002
• 4-07.110V
  M. Saglam, B. Schumann, K. Duwe, C. Domoto, A. Megej, M. Rodriguez-Girones, J.Müller, R. Judaschke, H. L. Hartnagel, High Performance of a 450 GHz GaAs-based Heterostructure Barrier Varactor Tripler, IEEE Electronics Device Letters,April 2003
• 4-07.116V
  K. Dembowski, 37 Bücher zu den Themen Microcontroller, PC-Messtechnik, Hardware, Netzwerke, Computerschnittstellen und Bussysteme, z.T. übersetzt in zehn SprachenK. Dembowski, 53 Artikel in Fachzeitschriften zu aktuellen Hard- und Software-Themen
• 4-07.117V
  Th. Uelzen, J. Müller, H. Imig, G. Riepe, C. Wintzer, M. Morlock, SAW basiertes Druckmesssystem für die Überwachung von Aneurysma-Implantaten, Beiträge der Informationstagung Mikroelektronik '01, ÖVE-Schriftenreihe 26, 2001, Wien, Austria
• 4-07.118V
  Th. Uelzen, J. Müller, H. Imig, G. Riepe, C. Wintzer, M. Morlock, SAW basiertes Druckmesssystem für die Überwachung von endovaskulär ausgeschalteten Bauchaortenaneurysma, Zentralblatt für Chirurgie, J.A. Barth, 2001, Stuttgart, Germany
• 4-07.119V
  T. Injinaash, J. Müller, Thermopneumatical Operated Printing System for Oligonucleotide- and DNA-Fragment Chips in Microsystem Technology Proceedings of 11th International Conference Sensor 2003, C7, pp.375-379, 2003, Nürnberg, Germany
• 4-07.120V
  B. Kasemset, M. Kasper, Simulation of Fluidic-Thermal-Magnetic Coupled Phenomena in a Paramagnetic Oxygen Microsensor, 4. GI/GMM/ITG-Workshop, Multi-Nature Systems, 2003, Ilmenau, Germany
• 4-07.121V
  WENDLANDT R., SEIDE K., WEINRICH N., WACKENHUT F., JÜRGENS C., MÜLLER J. (2005): 'Autonomous load measurements in the intelligent hexapod external fixator', Biomedizinische Technik 50(1):584-585
• 4-07.122V
  WENDLANDT R., SEIDE K., WEINRICH N., GERLACH U-J., JÜRGENS C., MÜLLER J. (2005): 'Bluetooth enabled system for in vivo monitoring and logging of biomechanical loads in external fixators', IFMBE Proc. 11(1):1726-1 - 1726-6
• 4-07.126V
  Stefan Wiechmann, Hans Joachim Heider, Jörg Müller, Analysis and Design of Integrated Optical Mirrors in Planar Waveguide Technology, J. Lightwave Tech., Vol. 21, No. 6, June 2003
• 4-07.127V
  N. Linke, F. Gromball, J. Heemeier, J. Müller, Electron Beam Crystallized Silicon Solar Cells on Glass, Proceedings 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 4P-B4-08, 2003
• 4-07.128V
  F. Gromball, J. Heemeier, N. Linke, M. Burchert, J. Müller, High Rate Deposition and In-situ Doping of Silicon Films for Solar Cells on Glass, Proceedings ISES Solar World Congress, Göteborg, Sweden, O4 13, 2003
• 4-07.129V
  F. Gromball, J. Heemeier, N. Linke, M. Burchert, J. Müller, High Rate Deposition and In-situ Doping of Silicon Films for Solar Cells on Glass, Solar Energy Materials and Solar Cells 84/1-4, 71-82, 2004
• 4-07.130V
  N. Linke, F. Gromball, J. Heemeier, J. Müller, Tungsten Silicide as Supporting Layer for Electron Beam Recrystallised Silicon Solar Cells on Glass, Proceedings 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, France, 2004
• 4-07.131V
  F. Gromball, J. Heemeier, N. Linke, J. Müller, Zone Melting Recrystallisation of Silicon Thick Films on Glass Substrates with a Regulated Line Shaped Electron Beam, Proceedings 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, France, 2004
• 4-07.132V
  M. Doms, J. Müller, A micromachined vapor-jet pump, Sens. & Act. A, Vol. 119/2 (2005), 462-467
• 4-07.133V
  M. Doms, A. Bekesch, J. Müller,Micro Pirani Pressure Sensor for Atmospheric Pressure, Proc. Sensor 2005, 12th International Conference Mai 2005, Vol. 1, 115-120
• 4-07.134V
  D.G. Weber, T. Injinaash, T. Polen, K. Dembowski, A. Veit, U. Lehmann, K. Sahm, V.F. Wendisch, G. Antranikian, J. Müller, H. Sahm, Transkript, Sonderausgabe Biokatalyse, Ed. S. Heiden, R. Erb, pp. 63-66, 2003
• 4-07.135V
  T. Injinaash, J. Müller, Thermopneumatical operated Print Head System for an Application in DNA-Chip Technology accept. Proceedings of 12th International Conference Sensor 2005, Nürnberg2005, Germany
• 4-07.136V
  T. Injinaash, J. Müller, K.Dembowski Piezoelectrical operated Print-Head System for a Short Base Chain Nucleotide-Chips in Microsystem Technology Proceedings of International Congress on Biocatalysis 2002, p.242-243, Hamburg, Germany
• 4-07.137V
  T. Injinaash, J. Müller Microball Valve for an Application in Time of Fly Mass Spectrometer accept. Proceedings of International Congress Sensor 2005, Nürnberg, Germany
• 4-07.138V
  Th. Uelzen Development of a fast localisable patient-safe MR-Catheter for MR-guided intravascular interventions based on Micro Systems Technology (LOMKAT) Info-Börse VDI/VDE-IT Nr. 55, Teltow, 2004
• 4-07.139V
  Th. Uelzen, J. Müller, S. Weiss, G. Pantel Schnell lokalisierbarer Patientensicherer Mr-Katheter für bildgeführte intravaskuläre Interventionen in MST Tagungsband der 38. DGBMT Jahrestagung Biomedizinische Technik 2004, Illmenau, 2004, 88-89
• 4-07.140V
  Th. Uelzen, J. Müller, S. Weiss, G. Pantel Safe Visualisation and Localisation of MR-Catheters for MR-guided intravascular interventions using an Optically detunable Resonant Marker in Micro System Technology Porceedings SAFE & ProRISC 2004, Velthoven, the Netherlands, 2004
• 4-07.141V
  Th. Uelzen, J. Müller, S. Weiss, G. Pantel Fast and safe catheter tip localisation for MR-guided intravascular interventions using a micro optically detunable resonant marker Proceedings 14th ICMP 2005, Nürnberg, Germany, 2005, pp. 380-381
• 4-07.142V
  A. Karilainen, T. Finnberg, T. Uelzen, K. Dembowski, J. Müller, Mobile Patient Monitoring Based on Impedance-Loaded Surface Acoustic Wave Sensors, IEEE Transactions On Ultrasonics, Ferroelectrics, and Frequency Control, November 2004, Volume 51, Number 11
• 4-07.143V
  T. Finnberg, A. Karilainen, K. Dembowski, J. Müller, Interrogation Unit for Wireless Mobile Long Term ECG Monitoring, Proceedings of VDE-BMT 2004, p. 248-249, Ilmenau, Germany
• 4-07.144V
  A. Karilainen, T. Finnberg, K. Dembowski, J. Müller, Wireless Passive Sensor Network for Long Term ECG Monitoring, Proceedings of VDE-BMT 2004, p. 266-267, Ilmenau, Germany
• 4-07.145V
  N. Weinrich, K. Seide, C. Jürgens, J. Müller, Transponder with Sensor-Interface for In Vivo Load Measurements on Internal Fixator Systems, Proc. Sensor 03, Vol. 2 (2003) 461-465
• 4-07.146V
  N. Weinrich, K. Seide, C. Jürgens, J. Müller, Telemetric System for Load Measurements on Internal Fixator Systems, Beiträge zur 38. Jahrestagung der DGBMT (BMT 2004), Biomed. Technik 49 (2) (2004) 448-449
• 4-07.147V
  K. Seide, N. Weinrich, C. Jürgens, D. Wolter, "Intelligenter" Fixateur externe für die Knochenbruchbehandlung, Beiträge der Informationstagung Mikroelektronik 2001 (ME'01), ÖVE Schriftenreihe Nr. 26, Wien (2001)
• 4-07.148V
  K. Seide, J. Wollnack, N. Weinrich, C. Jürgens, Theorie und Software des Hexapod Fixateurs externe, Biomed. Technik 47 (2002) 326-333
• 4-07.149V
  K. Seide, M. Faschingbauer, M.E. Wenzl, N. Weinrich, C. Jürgens, A Hexapod Robot External Fixator for Computer Assisted Fracture Reduction and Deformity Correction, Int. J. Medical Robotics and Computer Assisted Surgery 1 (2004) 64-69
• 4-07.150V
  K. Seide, N. Weinrich, M.E. Wenzl, D. Wolter, Ch. Jürgens, Three-dimensional load measurements in an external fixator, J. Biomech. 37 (2004) 1361-1369
• 4-07.151V
  S. Flinzberg, M. Heiland, M. Vesper, K. Seide, D. Wolter, N. Weinrich, R. Schmelzle, Osteosynthetische Versorgung von Mittelgesichtsfrakturen mit einem multidirektionalen winkelstabilen Plattensystem. Biomechanische Ergebnisse, MundKieferGesichtsChir 8 (2004) 154-162
• 4-07.152V
  K. Seide, N. Weinrich, U. Schümann, M. Faschingbauer, C. Jürgens, Automatic External Fixator Based on Parallel Robot Kinematics for the Optimized Inpatient and Telemedically Supported Outpatient Fracture and Deformity Treatment, Beiträge zur 38. Jahrestagung der DGBMT (BMT 2004), Biomed. Technik 49 (2) (2004) 118-119
• 4-07.153V
  M. Sussiek, J. Müller, U. Lehmann, Carbon Nanotubes as Adsorbent in Packed Columns for a Miniaturised Gas Chromatograph, Proceedings Sensor 2005, 12th International Conference, Vol. 2, 117 - 119
• 4-07.154V
  B. Kasemset, M. Kasper, Finite Element Simulation of Fluidic-Thermal Coupled Phenomea in a Micro Flow Sensor with Slip Boundary Conditions, 5. GI/GMM/ITG-Workshop, Multi-Nature Systems, 2005, Dresden, Germany
• 4-07.155V
  M. Doms, A. Bekesch, J. Müller, A Microfabricated Pirani Pressure Sensor Operating Near Atmospheric Pressure, J. Micromech. Microeng.,Vol. 15/8 (2005), 1504-1510
• 4-07.156V
  M. Doms, J. Müller, A Microfabricated Vapor-Jet Pump for Low Pressure Generation, Proc. uTAS, 9th International Conference Oct. 2005
• 4-07.157V
  M. Doms, J. Müller; A Micromachined Vapor-Jet Pump Generating Low pressure and High Pumping Speed; Proc. MME, 16th Workshop Göteborg 2005, 350-353
• 4-07.158V
  M. Doms, J. Müller; Treibmittel-Vakuumpumpe mit integrierter Druckmessung in Mikrosystemtechnik; Proc. VDE Mikrosystemtechnikkongress Freiburg 2005, 333-336
• 4-07.159V
  Th. Uelzen, J. Müller, S. Weiss, G. Pantel Catheter localisation for MR-guided interventions using a micro optically detunable resonant circuit Proceedings 3rd EMBEC 2005, Prag, Czechische Republik
• 4-07.160V
  Th. Uelzen, S. Fandrey, J. Müller Mechanical and electrical properties of electroplated copper for MR-Imaging Coils Journal of Microsystem Technologies, published online, 2005
• 4-07.161V
  Anna Karilainen, Thomas Finnberg, Jörg Müller Passive, Wireless ECG-Sensor Based on Impedance Loaded SAW-Transponders SAFE2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 November 2004, Veldhoven, The Netherlands. Pp. 753-759.
• 4-07.162V
  Anna Karilainen, Stefan Hansen, Jörg Müller. Dry and Capacitive Electrodes for Long-Term ECG-Monitoring. SAFE2005, 8th Annual Workshop on Semiconductor Advances for Future Electronics, 17-18 November 2005, Veldhoven, The Netherlands. Pp. 155-161
• 4-07.163V
  Anna Karilainen, Stefan Hansen and Jörg Müller. Novel Dry Electrodes for Long-Term ECG-Monitoring. Submitted for publication on 11 July 2005 to IEEE Transactions in Biomedical Engineering
• 4-07.164V
  Anna Karilainen. Passive Voltage¿Sensor based on saw¿technology. 345th Wilhelm und Else Heraeus Seminar: Acoustic Wave Based Sensors: Fundamentals, Concepts, New Applications, 10-13 April 2005, Bad Honnef. (Oral presentation)
• 4-07.165V
  Thomas Finnberg, Anna Karilainen, Jörg Müller. Mobile Integration Unit for Passive SAW-Sensors in Long-Term ECG-Monitoring. ProRISC2004, 15th Annual Workshop on Circuits, Systems and Signal Processing, 25-26 November 2004, Veldhoven, The Netherlands. Pp. 246-249
• 4-07.166V
  Anna Karilainen, Thomas Finnberg and Jörg Müller. ECG Sensor Based on Impedance Loaded SAW Transponder. VDE-BMT 2005. 14-17 September 2005 Pp. 433-434
• 4-07.167V
  Thomas Finnberg, Anna Karilainen and Jörg Müller.. Mobile Interrogation Unit for Passive SAW-Sensors in Long-Term ECG Monitoring VDE-BMT 2005. 14-17 September 2005 Pp. 439-440
• 4-07.168V
  Anna Karilainen, Thomas Finnberg and Jörg Müller. Wireless Passive Sensor for Measuring ECG and Other Biopotentials in Impedance Loaded SAW Technology. International Federation for Medical and Biological Engineering Proceedigs EMBEC¿05, The 3th European Medical and Biological Engineering Conference. Volume 11(1). 20-25 November 2005, Prague, Czech Republic.
• 4-07.169V
  Thomas Finnberg, Anna Karilainen and Jörg Müller. Mobile Interrogation Unit for Passive SAW-Sensors in Long-Term ECG-Monitoring. International Federation for Medical and Biological Engineering Proceedigs EMBEC¿05, The 3th European Medical and Biological Engineering Conference. Volume 11(1). 20-25 November 2005, Prague, Czech Republic.
• 4-07.170V
  Thomas Finnberg, Anna Karilainen, Jörg Müller. Interrogation Unit for SAW Delay Line Sensors, 345th Wilhelm and Else Heraeus Seminar on Acoustic Wave Based Sensors, 11-13 April 2005, Physikzentrum Bad Honnef, Germany (Poster)
• 4-07.171V
  "A Fully Integrated Micro Mass Spectrometer"E. Wapelhorst, J.-P. Hauschild, J. MüllerHEMS 2005 Workshop5th Workshop on Harsh-Environment Mass Spectrometry September 20-23, 2005Sarasota, Florida, USAhttp://cot.marine.usf.edu/hems/workshop/
• 4-07.172V
  "Vollständig Integrierte Plasma Elektronenquelle für ein Mikromassenspektrometer"Dipl.-Ing. Eric Wapelhorst, Dipl.-Ing. Jan-Peter Hauschild, Prof. Dr.-Ing. habil. Jörg MüllerMikrosystemtechnik Kongress 2005October 10-12, 2005Freiburg, Germanyhttp://www.mikrosystemtechnik-kongress.de/
• 4-07.173V
  "A FULLY INTEGRATED PLASMA ELECTRON SOURCE FOR MICRO MASS SPECTROMETERS"Jan-Peter Hauschild, Eric Wapelhorst, Jörg MüllerµTAS 2005Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS)October 9-13, 2005Boston, Massachusetts, USAhttp://www.microtas2005.org/
• 4-07.174V
  "A Fully Integrated Micro Plasma Electron Source in Silicon"E. Wapelhorst, J.-P. Hauschild, J. MüllerAVS2005AVS 52nd International Symposium 2005October 30 - November 4, 2005Boston, Massachusetts, USA
• 4-07.175V
  Harke A.,Krause M. and Mueller J., Low-loss singlemode amorphous silicon waveguides Electronics Letters, 2005, Vol.41 No.25, pp.1377-9
• 4-07.176V
  N. Weinrich, K. Seide, R. Wendlandt, U. Schümann, M. Faschingbauer, D. Wolter, C. Jürgens, J. Müller, A System for Wireless Monitoring of Loads Acting on Internal Fixators In Vivo, Biomed. Technik 50(1) (2005) 1535-1536
• 4-07.177V
  M. Faschingbauer, K. Seide, N. Weinrich, D. Wolter, J. Müller, C. Jürgens, Elektronisch instrumentierte ("intelligente") Implantate für die Osteosynthese, Z Orthop Ihre Grenzg 143(5) (2005) 489-491
• 4-07.178V
  K. Seide, M. Faschingbauer, N. Weinrich, C. Jürgens, J. Müller, "Intelligent" External and Internal Fixator Systems for Fracture Treatment, World Congress on External Fixation 2005, Lima, Peru (2005) WC300EF
• 4-07.179V
  F. Gromball, K. Ong, C. Groth, L. Fu, J. Müller, E. Strub, W. Bohne, J. Röhrich, Impurities in Electron Beam Recrystallised Silicon Absorbers on Glass, Proceedings 20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, Spain, 2005, 2DV.2.40
• 4-07.180V
  K. Ong, C. Groth, F. Gromball, J. Müller, In-Line Processing of Electron Beam Recrystallised Silicon Solar Cells on Glass, Proceedings 20th European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, Spain, 2005, 2DV.2.37
• 4-07.181V
  F. Gromball, C. Groth, J. Müller, Controlled line shaped electron beam for silicon zone melting recrystallization on float glass substrates, Review of Scientific Instruments 76, 063901, 2005
• 4-07.182V
  C. Groth, K. Ong, Silicon Thin Films from Trichlorosilane for Electron Beam Recrystallized Solar Cells, AVS 52nd International Symposium, USA, Boston, 2005
• 4-07.183V
  K. Duwe, J. Müller, Realization of a 150GHz to 450GHz Tripler Circuit Based on a Thin Dielectric HMDS-N-Membrane,IEEE MTT-S Digest,pp. 755-757, Juni 2003
• 4-07.185V
  R. Dekker, M. Dümling, J.-H Fock, O. Gourhant, C. Jonville, R. Kubrin, T.M. Michielsen,H.Pohlmann, W. Schnitt, A.M.H. Tombeur, T. Zoumpoulidis , CIRCONFLEX: an ultra-thin and flexible technology for RF-ID tags, in 15th European Microelectronics and Packaging conference & Exhibition (IMAPS), p 18, June 12-15, Brugge Belgium, 2005
• 4-07.186V
  R. Dekker, M. Dümling, J.-H Fock, O. Gourhant, C. Jonville, R. Kubrin, T.M. Michielsen, H.Pohlmann, W. Schnitt, A.M.H. Tombeur, T. Zoumpoulidis , A 10 um Thick RF-ID Tag for Chip-in-Paper Applications, Proc. IEEE Bipolar/BiCMOS Circuits and Technology meeting (BCTM), Santa Barbara, California, USA, p 268,October 9-11, 2005
• 4-07.187V
  R. Dekker, M. Dümling, J.-H Fock, O. Gourhant, C. Jonville, R. Kubrin, T.M. Michielsen, H.Pohlmann, W. Schnitt, A.M.H. Tombeur, T. Zoumpoulidis, CIRCONFLEX: a 10 µm Thick Flexible Silicon IC Technology forChip-In-Paper, (Invited Talk) Proc of the IMAPS Nordic Annual Conference 2005, p. 83, September 11-14, Tonsberg, Norway, 2005
• 4-07.188V
  M. Dümling, J. Müller, R. Dekker, H. Pohlmann, Encapsulation of a resonating structure using substrate transfer and thin film processes, Proccedings of the SAFE 2005, p 83, November 17-18 2005 , Veldhoven, The Netherlands
• 4-07.189V
  Manfred Kasper, Transmission Lines as a Versatile Tool in Microsystem Modelling In:Michel, Bernd; Aschenbrenner, Rolf (eds.): The World of Electronic Packaging and System Integration, ddp goldenbogen, Dresden (2004), p-569-574
• 4-07.190V
  Schischke, Karsten; Middendorfer, Andreas, Reichl, Herbert; Griese, Hansjoerg; Kasper, Manfred; Ong, Kilian, Green MST Design form a Designer¿s Perspective: How to Base Decisions on Environmental Issues ISEE International Symposium on Electronics & the Environment in Conjunction with Electronics Recycling SUMMIT, New Orleans (2005)
• 4-07.191V
  Kasper, Manfred, Elektrische Ersatzschaltungen für die Analogsimulation von Strömungen in Mikrokanälen, 5. Multi-Nature Systems Optoelektronische, Mechatronische und sonstige gemischte Systeme GMM-ITG-GI-Workshop, Dresden (2005)
• 4-07.192V
  Kilian Ong, Karsten Schischke, Manfred Kasper, Andreas Middendorf, Hansjoerg Griese, Herbert Reichl, Micro Systems Design Work Flows ¿ Assessment of Environmental Driven Criteria Electronic Goes Green 2004, Berlin (2004)

Dissertationen

• 4-07.027D
  V. Relling, Untersuchungen zum Aufbau eines Mikromassenspektrometers, Dissertation, TU Hamburg-Harburg, 1997, Germany
• 4-07.046D
  P. Siebert, Plasmagestützte Ionenquelle in Mikrosystemtechnik für den Einsatz in einem miniaturisierten Massenspektrometer, Dissertation, TU Hamburg-Harburg, 2001, Shaker Verlag
• 4-07.111D
  S. Hauttmann, Entwicklung und Charakterisierung eines Sensors zur impedanzspektroskopischen Analyse von biologischen Zellsuspensionen, Dissertation, TU Hamburg-Harburg, 2002, Shaker Verlag
• 4-07.112D
  A. Krämer, SQUID-Magnetometer mit YBa2Cu3O7 Korngrenzenstufenkontakten, Dissertation, TU Hamburg-Harburg, 2002, Shaker Verlag
• 4-07.113D
  M. Rostalsky, Plasmagestützte Abscheidung und Elektronenstrahlkristallisation von Silizium-Schichten zur Herstellung von Solarzellen, Dissertation, TU Hamburg-Harburg, 2002, Shaker Verlag
• 4-07.114D
  M. Mahnke, Chrom- und Titan-dotiertes Aluminiumoxid zur Herstellung eines abstimmbaren integriert-optischen Lasers, Dissertation, TU Hamburg-Harburg, 2002, Shaker Verlag
• 4-07.115D
  L. Mex, Miniaturisierte Brennstoffzelle, Dissertation, TU Hamburg-Harburg, 2002
• 4-07.184D
  K. Duwe, Planare Schaltungen für den Submillimeterwellenbereich auf dünnen HMDS-N-Membranen, Dissertation, TU Hamburg-Harburg, 2001, Shaker Verlag

Patente

• 4-07.028P
  Patent Nr. DE 197 20 278 A1, Miniaturisiertes Massenspektrometer, 1998, Germany
• 4-07.121P
  Patent Nr. DE 199 14 571, Verfahren zur Herstellung einer plasmapolymerisierten ionenleitenden Sperrschicht für Polymer-Elektrolytmembranen, 2002, Germany
• 4-07.122P
  Patent Nr. DE 199 14 661, Verfahren zur Herstellung einer integriert verschalteten Polymer-Elektrolyt-Membran-Brennstoffzelle, 2002, Germany
• 4-07.123P
  Patent Nr. DE 199 14 680, Polymer-Elektrolyt-Membran mit integrierter Katalysatormetall-dotierter poröser Graphit-Kontaktschicht, 2003, Germany
• 4-07.124P
  Patent Nr. DE 199 14 681, Polymer-Elektrolyt-Membran Brennstoffzellensystem in Mikrosystemtechnik, 2002, Germany
• 4-07.125P
  Patent Nr. DE 101 337 38 A1, Verfahren zur Herstellung einer plasmapolymerisierten Polymer-Elektrolytmembran, 2003, Germany
• 4-07.153P
  Patent Nr. DE 103 29 535 A1 , Miniaturisierte Anreicherungsvorrichtung, 2005, Germany